![]() PRESSURE AND TEMPERATURE DETERMINATION DEVICE, PRESSURE AND TEMPERATURE SENSOR COMPRISING SUCH A DEV
专利摘要:
This device for determining pressure and temperature (1) comprises a membrane (2), which has a contact face (2.1) with the fluid and a securing face (2.2) opposite to the contact face (2.1), a pressure determining element (20) integral with the membrane (2), and a temperature determining element (40) integral with the membrane (2). The pressure determining element (20) comprises at least one piezoresistive track. The temperature determining element (40) comprises at least one thermistor track. 公开号:FR3017211A1 申请号:FR1450877 申请日:2014-02-05 公开日:2015-08-07 发明作者:Marc Novellani;Hammouda Chokri Ben 申请人:MGI Coutier SA; IPC主号:
专利说明:
[0001] The present invention relates to a device for determining pressure and temperature for determining the pressures and temperatures of a fluid flowing for example in a motor vehicle. In addition, the present invention relates to a pressure and temperature sensor comprising such a device for determining pressure and temperature. Furthermore, the present invention relates to a method of manufacturing such a device for determining pressure and temperature. The present invention applies in particular to the field of motor vehicles, in particular commercial vehicles, passenger vehicles and trucks, in order to determine and measure the pressures and temperatures of different fluids flowing in such a vehicle, such as fuel, oil, urea (SCR) or air flowing into the air intake system. EP0893676A2 illustrates a pressure and temperature sensor which comprises a pressure and temperature determining device comprising a membrane in contact with the fluid, a pressure determining element and a temperature determining element. The pressure determining element is composed of a capacitive element. However, such a sufficiently accurate and reliable capacitive element must be bulky, which induces a large size for the pressure and temperature determination device. In addition, because of this congestion, the temperature determination element must be attached to the face of the membrane which is in contact with the fluid. On the one hand, such mounting reported requires welds and holes through the membrane, which can cause sealing problems and pollution of the pressure sensor and temperature. On the other hand, such an arrangement reduces the service life of the pressure and temperature determining device because the temperature determining element is exposed to corrosive fluids, such as a fuel. Or, such an assembly of the temperature determining element considerably increases the cost of manufacture, since the temperature determination element must be protected. The present invention is intended in particular to solve, in whole or in part, the problems mentioned above. For this purpose, the subject of the invention is a device for determining pressure and temperature, for determining the pressures and temperatures of a fluid, flowing for example in a motor vehicle, the pressure-determining device and temperature comprising: - a membrane having a contact face intended to be in contact with the fluid, at least one pressure-determining element which is sensitive to pressure and which is integral with the membrane, and - at least one element temperature determination which is temperature sensitive and which is integral with the membrane; the pressure and temperature determining device being characterized in that: said at least one pressure determining element comprises at least one piezoresistive track, and in that said at least one element of temperature determination comprises at least one track. thermistante. [0002] In other words, the pressure and temperature determining device forms a combined device for determining pressures and temperatures. Thus, such a device for determining pressure and temperature is particularly compact. Indeed, the piezoresistive (s) and thermistante (s) form respectively pressure and temperature determining elements which are compact and integrated on the membrane. Congestion is also reduced because the presence of piezoresistive (s) and thermistor (s) tracks reduces the number of components required, for example to 8, instead of 18 with a device for determining pressure and temperature of the prior art. In addition, in comparison with capacitive elements used by pressure and temperature determination devices of the prior art, a piezoresistive track is more robust, simpler to implement. Thus, the device for determining pressure and temperature has a relatively low cost. Moreover, a thermistante track is efficient in terms of temperature response time. In the present application, the term "determine" and its derivatives means to emit a signal representative of a physical quantity. Thus, a pressure determining element outputs signals representative of the pressure, and a temperature determining element outputs signals representative of the temperature. [0003] A piezoresistive track can form a pressure determining element because, under the effect of a pressure exerted by the fluid on the contact face, the piezoresistive track undergoes an imbalance proportional to this pressure, thus generating a voltage representative of this pressure. Indeed, a piezoresistive component has an electrical resistance that changes as a function of a mechanical stress (pressure) experienced by this component. A thermistor track can form a temperature determining element, because its electrical resistance is representative of the temperature of the membrane, which undergoes the temperature variations imposed by the fluid. Indeed, a thermistor component has an electrical resistance that varies depending on the temperature at which this component is exposed. An electronic signal conditioning unit can then condition the signals of the piezoresistive (s) and thermistor (s) tracks, for example to amplify and / or linearize them. According to one embodiment of the invention, the membrane further has a securing face opposite to the contact face, and said at least one pressure determining element and said at least one temperature determining element are directly attached to the fastening face. Thus, since the pressure and temperature determining elements are not exposed to the fluid, the pressure and temperature determining device has a very high resistance to corrosive fluids such as a fuel. Moreover, since the pressure and temperature determining elements are integrated on the diaphragm without a layer or intermediate film, the device for determining pressure and temperature makes it possible to optimize the measurements, in particular since this reduces the thermal inertia. which allows to quickly heat the thermistor. Alternatively, said at least one pressure determining element and said at least one temperature determining element can be secured indirectly to the securing face. For example, a layer may be interposed between the securing face and said at least one piezoresistive track or said at least one thermistor track. According to one embodiment of the invention, said at least one piezoresistive track is printed on the membrane, preferably by screen printing, and said at least one thermistor track is printed on the membrane, preferably by screen printing. Thus, the device for determining pressure and temperature has a relatively low cost, because the piezoresistive (s) and thermistante (s) 5 tracks are from impressions, which allows to realize simply very precise printed tracks. According to a variant of the invention, said at least one piezoresistive track is composed of at least one material selected from the group consisting of mineral matrices and organic polymer matrices. Thus, such a material makes it possible to confer on the piezoresistive track good pressure determination properties, especially in terms of the coefficient of measurement, linearity and hysteresis of the response curve, of the resolution, of the accuracy, of the response time. . For example, the or each piezoresistive track may be ruthenate (ruthenium oxide). According to a variant of the invention, said at least one piezoresistive track has a thickness of between 0.2 mm and 1.0 mm. According to one embodiment of the invention, said at least one piezoresistive track forms a plurality of pressure gauges remote from each other, the pressure and temperature determining device further comprising conductive tracks connecting the pressure gauges in such a way that forming an electrical pressure measuring circuit, for example a Wheatstone bridge. Thus, such pressure gauges, coupled to such an electrical pressure measuring circuit, make it possible to determine the pressure with a high accuracy and a short response time. These conductive tracks may be composed of a silver-palladium alloy (Pd-Ag). In the present application, the terms "conduct", "connect", "connect" and their derivatives refer to electrical conduction. According to a variant of the invention, said at least one thermistor track may be composed of metal oxides. Thus, such a material makes it possible to give the thermistor track good temperature determination properties, especially in terms of resolution, linearity, accuracy and response time. According to a variant of the invention, said at least one thermistor track has a thickness of between 0.2 mm and 1.0 mm. [0004] According to a variant of the invention, said at least one thermistor track has a negative temperature coefficient (NTC). Alternatively, said at least one thermistor track has a positive temperature coefficient (PTC). [0005] According to a variant of the invention, said at least one thermistor track forms several temperature gauges distant from each other, the pressure and temperature determination device further comprising conductive tracks connecting the temperature gauges so as to form a electrical circuit for measuring temperature, for example a Wheatstone bridge. Thus, such remote temperature gauges make it possible to determine the temperatures at several points, thus to obtain a very precise average temperature. The electric temperature measuring circuit may or may not be independent of the electrical circuit for measuring pressure. [0006] According to one embodiment of the invention, the membrane is composed of a ceramic, preferably comprising at least 95% of alumina, the membrane preferably having a thickness of between 0.2 mm and 2.0 mm. Thus, such a ceramic allows the membrane to deform rapidly under the effect of the pressure exerted by the fluid, so that the or each piezoresistive track can determine the pressure of the fluid. In addition, such a ceramic allows rapid and precise deposition of piezoresistive (s) and thermistante (s). According to one embodiment of the invention, the membrane is generally flat. Thus, such a membrane has a planar securing face, which simplifies the deposition of the or each piezoresistive track. Alternatively, the membrane may have a three-dimensional shape, that is to say non-flat. In particular, the membrane may define a glove-like volume projecting into a fluid conduit to accurately determine temperature by positioning that glove finger directly into the fluid flow. According to a variant of the invention, the membrane may have a generally elliptical shape, for example circular, or a generally rectangular shape, for example square. [0007] According to one embodiment of the invention, the device for determining pressure and temperature further comprises a base, preferably comprising at least 95% alumina, said base being configured to define a chamber around said at least one piezoresistive track and said at least one thermistor track. Thus, such a base defining the chamber makes it possible to measure relative or absolute pressure. In addition, such a base can support on the one hand the membrane and on the other hand an electronic signal conditioning unit. [0008] According to a variant of the invention, the membrane is attached to the base (technology called "flush-membrane"). For example, the device for determining pressure and temperature may further comprise a glass joint secured to the base and the membrane on the periphery of the securing face. [0009] Thus, such a glass seal makes it possible to seal a chamber surrounding said at least one piezoresistive track and said at least one thermistor track. To manufacture this glass joint, it is necessary to have a glass paste (silica) on the periphery of the securing face between the membrane and the base, and then to heat to the melting temperature of the glass. [0010] Alternatively, the membrane is integral with the base. In other words, the membrane and the base form a monolithic assembly without, for example, a glass joint. According to one embodiment of the invention, the base has at least one venting hole opening on the one hand on the membrane and on the other hand on an outer face of the base. Thus, such vent hole can measure relative pressures. Alternatively, the base is configured so that said chamber is sealed. In other words, the base is devoid of a vent hole. Thus, such a base makes it possible to measure absolute pressures. In addition, the present invention relates to a pressure and temperature sensor for measuring pressures and temperatures of a fluid, flowing for example in a motor vehicle, the pressure and temperature sensor comprising minus: - a device for determining pressure and temperature according to the invention, - a connection member configured to fluidically connect the contact face to a pipe of the fluid, an electronic signal conditioning unit connected on the one hand to said at least one piezoresistive track and secondly at said at least one thermistor track, and - a connector connected to the electronic signal conditioning unit and having output terminals. [0011] Thus, such a combined pressure and temperature sensor is particularly reliable, accurate, compact and lightweight compared to a combined pressure and temperature sensor of the prior art. In addition, because of the simplicity of the structure of the pressure and temperature determining device, the electronic circuitry for connecting the pressure and temperature determining elements is simpler than in a combined pressure and temperature sensor. prior art. In the present application, the term "sensor" refers to a set whose response, numerically or analogically, is representative of the measurement of physical quantities, in this case pressure and temperature. According to a variant of the invention, the electronic signal conditioning unit comprises a signal amplifier and / or a signal linearization component. The amplifier and / or the linearization component may for example be integrated in an application specific integrated circuit (ASIC). Depending on the intended application for the pressure and temperature determining device, the electronic signal conditioning unit may provide an analog response or a digital response. According to a variant of the invention, the components of the electronic signal conditioning unit are integrally connected to the base in a hybrid manner. Alternatively, the electronic signal conditioning unit is formed on a printed circuit which is attached to the base for example by welding. [0012] According to a variant of the invention, the connection member has a passage for the fluid having dimensions of between 2 mm and 6 mm. Thus, such a diameter makes it possible to minimize the temperature response time while maintaining a static pressure measurement. Static pressure can be measured because the passage for the fluid can be arranged perpendicular to the flow direction of the fluid in the conduit on which the sensor is mounted. Alternatively, the passage for the fluid can be arranged obliquely, for example at 45 degrees, to the flow direction of the fluid in the conduit on which the sensor is mounted. According to one embodiment of the invention, the pressure and temperature sensor according to the invention further comprises an O-ring which is compressed between the contact face and the periphery of the connection member, the connection having a passage for the generally circular section fluid whose diameter is substantially equal to the inner diameter of the O-ring after compression of the O-ring. Thus, such a concurrent arrangement of the inner perimeter of the O-ring and the perimeter of the fluid passage of the connecting member 20 limits or even avoids the stagnation of the fluid. This makes it possible to have a rapid heat transfer, by forced convection, of the fluid to the membrane. Indeed, in areas of fluid stagnation, heat transfer is slow because it is done by conduction and natural convection. According to one embodiment of the invention, the pressure and temperature sensor further comprises at least two support pads arranged in plane support on the one hand against the base and on the other hand against the connector. Thus, the flatness of the support pads ensures the homogeneity of the stress exerted on the membrane, this homogeneous stress making it possible to standardize the compression of the O-ring, thus to obtain an optimum seal. The homogeneity of the stress also contributes to the accuracy of the pressure measurement. According to one embodiment of the invention, the pressure and temperature sensor further comprises elastic and conductive strips 35 respectively arranged between said output terminals and the base or said electronic signal conditioning unit. [0013] Thus, such elastic and conductive strips (also known by the term "contact spring") allow a simple assembly of the pressure sensor and temperature, because these slats can be compressed during assembly of the connector with the body of connection so as to establish the electrical contacts. For example, these elastic and conductive strips may be soldered or brazed to the base and / or said electronic signal conditioning unit. According to a variant of the invention, the base has connection ports having a conductive coating, and the pressure and temperature sensor further comprises conductive blades for direct plugging (also known by the English term "press-fit"). ) which are inserted or overmolded respectively in the connection ports. Thus, such elastic and conductive terminals allow simple assembly of the pressure and temperature sensor, because these terminals can be inserted or overmolded during assembly of the connector with the connecting member so as to establish the electrical contacts. According to one embodiment of the invention, the connection member comprises a fixing portion and the connector comprises a fixing portion, the fixing portion being secured to the fastening portion 20 by welds. According to a variant of the invention, the fixing portion completely or partially covers the fixing portion. Alternatively, the fixing portion completely or partially covers the fixing portion. According to a variant of the invention, the dimensions of the fixing portion and the fixing portion are determined so that the assembly of the fixing portion and the fixing portion is adjusted or tightened. Thus, the small clearance between the fixing portion and the fixing portion provides an optimum and mechanically resistant welding. According to one embodiment of the invention, all or some of the welds are located on at least one weld surface which is transverse, preferably perpendicular, to the contact face. For example, the welds may be located on a weld surface that is cylindrical and extends around the or a fluid passage of the connecting member. Thus, since the welds are transverse to the contact face, the connecting member is mounted in axial abutment against the connector, which makes it possible to hold the components of the pressure and temperature sensor in place and to obtain a constant stress. exerted on the membrane. The chain of dimensions between the different components is guaranteed by this axial stop. [0014] According to a variant of the invention, all or part of the welds are located on at least one welding surface which is parallel to the contact face. For example, the welds may be located on a weld surface that is annular and extends around the or a fluid passage of the connecting member. [0015] In order to weld the connection member and the connector, one of the connecting member and the connector is made of a laser-transparent plastic material, the other one of the connector and the connecting member being composed of a laser-opaque plastic material. Thus, this allows the connector to be welded to the connection member by heating an outer region of the laser-opaque plastic material by means of a laser passing through the laser-transparent plastics material. It is possible to render a plastic material transparent or opaque to the laser by incorporating specific dyes. Alternatively, the connecting member may be metallic. According to a variant of the invention, the connecting member and the connector are composed of polymeric materials selected from the group consisting of a polyamide (PA), a polyphthalamide (PPA), a polyphenylsulfone (PPS) , a polyetherimide (PEI) and a polyetheretherketone (PEEK). According to a variant of the invention, the connecting member may be composed of polymer loaded with a conductive material such as carbon black, carbon nanotubes or carbon fibers. Thus, such a connecting member avoids the accumulation of electrostatic charges which are for example generated by the passage of the fluid. According to a variant of the invention, the external surface of the pressure and temperature sensor comprises a coating of electrically conductive material. Thus, such a conductive coating can form an electromagnetic shield, in order to meet the requirements of electromagnetic compatibility (EMC). According to a variant of the invention, the connecting member is configured to be connected transversely, preferably perpendicularly, to the flow direction of the fluid in a pipe belonging to the motor vehicle. Thus, the pressure and temperature sensor disturbs the flow of the fluid as little as possible. According to a variant of the invention, the pressure and temperature sensor further comprises at least one seal adapted to seal between the pressure and temperature sensor and a complementary housing of the motor vehicle, the connector or the connecting member having a groove configured to partially receive the seal. [0016] Thus, such a seal allows a fixing of the pressure sensor and temperature on the motor vehicle removably, for example by means of a clip, which allows to disassemble and replace the pressure sensor and temperature where appropriate. Furthermore, the subject of the present invention is a manufacturing method, for manufacturing a device for determining pressure and temperature according to the invention, the manufacturing method comprising the steps of: depositing conductive tracks on the membrane, preferably through a first serigraphy screen and in a thick layer, depositing said at least one piezoresistive track, preferably through a second screen printing screen, so as to secure said at least one piezoresistive track to the membrane, and - deposit said least one thermistor track, preferably through a third screen screen, so as to secure said at least one thermistor track to the membrane. Thus, such a manufacturing method is simpler and faster than a manufacturing method of the prior art. Indeed, the presence of piezoresistive (s) and thermistor (s) tracks reduces the number of components necessary to assemble, for example 8, instead of 18 with a pressure and temperature determination device of the prior art. . The order of the steps of this manufacturing process can be modified without departing from the scope of the present invention. According to a variant of the invention, after at least one of said deposition steps, the manufacturing method further comprises a step of carrying out an oven drying and a heat treatment adapted to evaporate the solvents. [0017] According to one embodiment of the invention, the manufacturing method further comprises a step of adjusting, by laser adjustment (known as "laser trimming"), said at least one piezoresistive track and said at least one a thermistante track. [0018] Thus, such a laser adjustment makes it possible to define pressure and temperature determination elements with high precision, which increases the performance of the device for determining pressure and temperature. Furthermore, the present invention relates to an automotive vehicle comprising at least one such pressure and temperature sensor. The embodiments and variants mentioned above may be taken individually or in any technically permissible combination. The present invention will be well understood and its advantages will also emerge in the light of the description which follows, given solely by way of nonlimiting example and with reference to the appended drawings, in which: FIG. 1 is a diagrammatic view in section of a device 20 for determining pressure and temperature according to a first embodiment of the invention; FIG. 2 is a perspective view of the pressure and temperature determination device of FIG. 1; FIG. 3 is an electric diagram of an electric pressure measurement circuit and an electric temperature measuring circuit belonging to the pressure and temperature determination device of FIG. 2; FIG. 4 is a view similar to FIG. 1 and illustrating a pressure and temperature determination device 30 according to a second embodiment of the invention; FIG. 5 is a section of a pressure and temperature sensor comprising the pressure and temperature determination device of FIG. 2; FIG. 6 is a view of detail VI in FIG. 5; FIG. 7 is a sectional view of a portion of a pressure and temperature sensor according to a third embodiment of the invention and comprising a device for determining pressure and temperature. according to this third embodiment of the invention; FIG. 8 is a sectional view of a portion of a pressure and temperature sensor according to a fourth embodiment of the invention and comprising a pressure and temperature determination device according to this fourth embodiment. of the invention; FIG. 9 is a perspective view on a larger scale of a component of the pressure and temperature sensor of FIG. 8; and FIG. 10 is a logic diagram illustrating a manufacturing method according to the invention. FIGS. 1, 2, 3, 4, 5 and 6 illustrate a device for determining pressure and temperature 1 belonging to a pressure and temperature sensor, which is illustrated in FIGS. 5 and 6 and which equips a non-motor vehicle represent. The device for determining pressure and temperature 1 is intended to determine pressures, symbolized by the arrows P in FIG. 1, and the temperatures of a fluid, the flow of which is symbolized by arrows F in FIGS. flowing in the motor vehicle. The device for determining pressure and temperature 1 comprises a membrane 2 which has a contact face 2.1 designed to be in contact with the fluid F. In the example of FIGS. 1 to 6, the membrane 2 is made of a ceramic comprising 96% alumina. The membrane 2 here has a thickness E2 of about 1.0 mm. The membrane 2 is flat and circular in shape. The pressure and temperature determining device 1 further comprises a pressure determining element 20 which is sensitive to the pressure P and which is integral with the membrane 2. As shown in FIG. 2, the pressure determining element 20 includes piezoresistive tracks 22, visible in Figure 2. The piezoresistive tracks 22 each have a thickness of about 0.5 mm. The membrane 2 has a certain flexibility, so as to transmit the pressure P to the piezoresistive tracks 22. The pressure and temperature determining device 1 further comprises a temperature determining element 40 which is 2. As shown in FIG. 2, the temperature determining element 40 comprises thermistor tracks 42. Each thermistor track here has a negative temperature coefficient (NTC). The thermistor tracks 42 each have a thickness of about 0.4 mm. When the fluid F is in contact with the contact face 2.1, the membrane 2 is brought to the temperature of the fluid, so that the membrane 2 carries the thermistor tracks 42 at a temperature representative of the fluid F. The membrane 2 has in addition to a securing face 2.2 which is opposite to the contact face 2.1. The pressure determining element 20 and the temperature determining element 40 are here secured directly to the securing face 2.2. In this case, the piezoresistive tracks 22 are printed by screen printing on the securing face 2.2. Similarly, the thermistor tracks 42 are printed by screen printing on the securing face 2.2. As shown in FIGS. 2 and 3, the piezoresistive tracks 22 form pressure gauges spaced apart from one another. The pressure and temperature determination device 1 further comprises conductive tracks 24 connecting these pressure gauges so as to form an electric pressure measuring circuit 25 (FIG. 3), here formed in a Wheatstone bridge. This Wheatstone bridge operates conventionally and is known per se. Similarly, the thermistor tracks form temperature gauges spaced apart from each other, and the pressure and temperature determining device 1 comprises conductive tracks connecting these temperature gauges so as to form an electrical circuit for measuring temperature. The pressure and temperature determining device 1 further comprises a base 4 which comprises 96% of alumina. The base 4 is configured to define a chamber 6 around the piezoresistive tracks 22 and thermistor tracks 42. [0019] As shown in Figure 1, the membrane 2 is attached to the base 4. The pressure and temperature determination device 1 comprises for this purpose a glass joint 31 which is secured to the base 4 and the membrane 2 on the periphery of the fastening face 2.2. The glass joint 31 makes it possible to seal the chamber 6, thus the piezoresistive tracks 22 and the thermistor tracks 42. To manufacture the glass joint, it is possible, for example, to dispose a glass paste on the periphery of the fastening face 2.1. between the membrane 2 and the base 4, and then heat to the melting temperature of the glass. As shown in Figure 1, the base 4 has a vent hole 32 which opens on the one hand on the membrane 2 and on the other 10 on an outer face 4.1 of the base 4. Such a vent hole 32 makes it possible to measure relative pressures P. FIG. 4 illustrates a device for determining pressure and temperature 101 according to a second embodiment of the invention. The device for determining pressure and temperature 101 is similar to the pressure and temperature determination device 1 described in relation to FIGS. 1 to 3. Thus, the device for determining pressure and temperature comprises in particular: a membrane 102 with a contact face 102.1, 20 - a base 104, defining a chamber 106, - a glass seal 131 arranged in a sealed manner between the membrane 102 and the base 104, - a pressure determining element 120 comprising tracks piezoresistive, and a temperature determining element 140 comprising thermistor tracks. The pressure and temperature determining device 101 differs from the pressure and temperature determining device 1 because the base 104 is configured so that the chamber 106 is sealed around the piezoresistive and thermisting tracks. In other words, the base 104 is devoid of the venting hole 32. In practice, the base 104 can be manufactured as the base 4, that is to say with a hole of bet to the atmosphere, then the hole is closed. Thus, the pressure and temperature determining device 101 can determine absolute pressures, while the pressure and temperature determining device 1 can determine relative pressures. [0020] FIG. 5 illustrates the pressure and temperature sensor 51, which is intended to measure pressures P and temperatures of the fluid F. As shown in FIGS. 5 and 6, the pressure and temperature sensor 51 comprises: the device pressure and temperature determination 1; a connection member 54 configured for fluidically connecting the contact face 2.1 to a line 62 of the fluid F, an electronic signal conditioning unit 56 (FIG. 6) connected on the one hand to the piezoresistive tracks 22 and on the other hand to the thermistor tracks 42, and a connector 58 connected to the electronic signal conditioning unit 56 and having output terminals 59. In the example of FIGS. 5 and 6, the connection member 54 has a passage 64 connecting fluidically the contact face 2.1 to the pipe 62. The connecting member 54 is here configured to be connected perpendicularly to the direction of flow of the fluid in a pipe belonging to the motor vehicle. When the pressure and temperature sensor 51 is in use, the fluid F is in contact with the contact face 2.1, so that the pressure and temperature determining device 1 can determine the pressure P and the fluid temperature F. The electronic signal conditioning unit 56 is here formed on a printed circuit board which is mounted on the base 4. The electronic signal conditioning unit 56 may comprise a signal amplifier and / or a linearization component. signals, which are integrated in an Application Specific Integrated Circuit (ASIC). The electronic signal conditioning unit here provides an analog response on the output terminals 59 of the connector 58. The connecting member 54 and the connector 58 are here composed of a polyamide (PA). The connecting member 54 is here charged with a conductive material such as carbon black, which prevents the accumulation of electrostatic charges. The outer surface of the pressure and temperature sensor 51 could include a coating of electrically conductive material which forms an electromagnetic shield. [0021] The pressure and temperature sensor 51 further comprises an O-ring 60 which is compressed between the contact face 2.1 and the periphery of the connection member 54. The passage 64 of the connection member 54 here has a section generally. circular, whose diameter D64 is substantially equal to the inner diameter of the O-ring 60 after compression of the O-ring 60, which avoids or limits the appearance of fluid stagnation zones F. The diameter D64 of the passage 64 is here about 4 mm. In use, the fluid F flows from the pipe 62 through the passage 64 and up to the contact face 2.1. [0022] To make Figures 5 and 6 more readable, the O-ring 60 is shown in its state before compression. However, Figures 5 and 6 show the pressure and temperature sensor 51 in assembled configuration, in which the O-ring 60 is normally compressed. As shown in FIG. 6, the pressure and temperature sensor 51 further comprises support pads 70 which are arranged in plane support on the one hand against the base 4 and on the other hand against the connector 58. As shown in FIGS. 5 and 6, the connection member 54 has a securing portion 54.5 and the connector 58 has a securing portion 58.5. The fixing portion 54.5 is secured to the fixing portion 58.5 by unreferenced welds. The fixing portion 54.5 and the fixing portion 58.5 have complementary shapes, which allows them to be interlocked. In this case, the fixing portion 54.5 of the connecting member 54 completely covers the fastening portion 58.5 of the connector 58. The dimensions of the fastening portion 54.5 and the securing portion 58.5 are determined so that the assembly of the fastening portion 54.5 and the securing portion 58.5 is adjusted or tightened to obtain a mechanically strong weld. The welds between the fastening portion 54.5 and the securing portion 58.5 are located on a weld surface 57 which is perpendicular to the contact face 2.1. In the example of FIGS. 5 and 6, the surface 57 is cylindrical and coaxial with the axis Z64 of the passage 64 of the connection member 54. Moreover, as shown in FIG. 5, the pipe 62 is of the type "Fir connector" because it has annular ribs 63 for fastening a not shown flexible hose through which the fluid flows. In order to weld the connection member 54 and the connector 58, the connection member 54 is made of a laser-transparent plastic material and the connector 58 is made of a laser-opaque plastic material. Thus, a laser beam can heat the fixing portion 58.5, at the weld surface 57, without heating the fixing portion 54.5 throughout its thickness. Figure 7 illustrates a pressure and temperature sensor 251 according to a third embodiment of the invention. Insofar as the pressure and temperature sensor 251 is similar to the pressure and temperature sensor 51, the description of the pressure and temperature sensor 51 given above in relation to FIGS. 1 to 6 can be transposed to the sensor. pressure and temperature 251, with the notable differences noted below. A component of the pressure and temperature sensor 251 which is identical or corresponding, in structure or function, to a component of the pressure and temperature sensor 251 has the same numerical reference increased by 200. Thus, a membrane 202 is defined with a contact face 202.1, a base 204, a connecting member 254 with a fixing portion 254.5, an electronic signal conditioning unit 256, a connector 258 with a fixing portion 258.5 and an O-ring 260. As for the At the pressure and temperature 51, the fixing portion 254.5 is secured to the fastening portion 258.5 by unreferenced welds and complementary shapes allowing the fastening portion 254.5 and the fastening portion 258.5 to interlock. The pressure and temperature sensor 251 differs from the pressure and temperature sensor 51 because the attachment portion 258.5 of the connector 258 completely covers the attachment portion 254.5 of the connecting member 254, while in the pressure sensor and of temperature 51, it is the fixing portion 54.5 which covers the fixing portion 58.5. As with the pressure and temperature sensor 51, the welds between the fastening portion 254.5 and the fastening portion 258.5 are located on a weld surface 257 which is perpendicular to the contact face 202.1. In the example of FIGS. 5 and 6, the weld surface 257 is cylindrical and coaxial with the axis of the passage 264 of the connecting member 254. FIG. 8 illustrates a pressure and temperature sensor 351 in accordance with a fourth embodiment of the invention. Insofar as the pressure and temperature sensor 351 is similar to the pressure and temperature sensor 51, the description of the pressure and temperature sensor 51 given above in relation to FIGS. 1 to 6 can be transposed to the sensor. pressure and temperature 351, with the exception of the notable differences set forth below. A component of the pressure and temperature sensor 351 which is identical or corresponding, in structure or function, to a component of the pressure and temperature sensor 351 has the same numerical reference increased by 300. Thus, a membrane 302 is defined with a contact face 302.1, a base 304, a connecting member 354 with a fixing portion 354.5, an electronic signal conditioning unit 356, a connector 358 with a fixing portion 358.5 and an O-ring 360. As for the sensor With pressure and temperature 51, the fixing portion 354.5 is secured to the fastening portion 358.5 by unreferenced welds and complementary shapes allowing the attachment portion 354.5 and the fastening portion 358.5 to interlock. The pressure and temperature sensor 351 differs from the pressure and temperature sensor 51 because the welds are located on a solder surface 357 which is parallel to the contact face 302.1. In this case, the weld surface 357 is an annular surface which extends around the passage 364 of the connecting member 354. The pressure and temperature sensor 351 further comprises lamellae 375 which are resilient and conductive and which are arranged respectively between the output terminals 376 of the connector 358 and the electronic signal conditioning unit 356 or the base 304. FIG. 9 illustrates an example of an elastic and conducting lamella such as the lamellae 375. The 375 lamellae allow simple assembly of the pressure and temperature sensor 301. It will be appreciated that the pressure and temperature sensor 51 may also include lamellae similar to lamellae 375. [0023] Like the pressure and temperature sensor 51, the pressure and temperature sensor 351 further comprises support pads 370 which are arranged in plane support on the one hand against the base 304 and on the other hand against the connector. 358. [0024] As shown in Figure 8, the pressure and temperature sensor 351 further comprises a seal 353 which is adapted to seal between the pressure sensor and temperature 351 and a complementary housing not shown of the motor vehicle . The connector 358 has a groove configured to partially receive the seal 353. In other words, the seal 353 protrudes from the groove, and it can bear against the complementary housing. FIG. 10 illustrates a manufacturing method 501, for manufacturing the device for determining pressure and temperature 1. This manufacturing method 501 comprises the steps of: 502) depositing on the membrane 2 conductive tracks 24, through a first screen of screen printing (not shown and in thick film), - 504) depositing the piezoresistive tracks 22 through a second screen screen, not shown, so as to join the piezoresistive tracks 22 to the membrane 2, and - 506) deposit the thermistor tracks 42, through a third screen screen not shown, so as to secure the thermistor tracks 42 to the membrane 2. The manufacturing method 501 further comprises a step 508) of adjusting, by laser adjustment (technique known by the term English "laser trimming"), the piezoresistive tracks 22 and the thermistor tracks 42. After each of the deposition steps 502), 504 ) and 506, the manufacturing method 501 further comprises steps 503), 505), 507) which respectively consist in carrying out a parboiling and a heat treatment adapted to evaporate the solvents used during the deposition steps 502), 504) and 506). Subsequently, the pressure and temperature sensor can be assembled as described above, especially with welds made to the laser beam. The connector can be manufactured by overmolding. After the assembly of the pressure and temperature sensor, a final step may be to calibrate and control the signals emitted by the piezoresistive and thermistor tracks. In use, as shown in FIG. 5, the fluid F flows into the pipe 62. In use, the fluid F flows from the pipe 62 through the passage 64 and up to the contact face 2.1. After the fluid F has come into contact with the contact face 2.1, the membrane 2 transmits the fluid pressure to the piezoresistive tracks 22 and the thermistor tracks 42 are brought to the temperature of the membrane 2, therefore at a temperature representative of the The pressure and temperature determining device 1 thus determines the pressure P and the temperature of the fluid F. Then, the electronic signal conditioning unit 56 collects and processes the signals emitted by the determination device. This processing may consist in amplifying and / or linearizing these signals by means of an application specific integrated circuit (ASIC). After this processing, the electronic signal conditioning unit 56 generates the response of the pressure and temperature sensor. This response, analog or digital, can be read by a central unit 20 of the motor vehicle, in order to know the pressure P and the temperature of the fluid F. Of course, the invention is not limited to the particular examples described herein. request. Other embodiments within the reach of those skilled in the art can also be envisaged without departing from the scope of the invention defined by the claims below.
权利要求:
Claims (16) [0001] REVENDICATIONS1. A pressure and temperature determining device (1; 101) for determining pressures (P) and temperatures of a fluid (F) flowing for example in a motor vehicle, the pressure determining device and temperature (1; 101) comprising: - a membrane (2; 102) having a contact face (2.1) intended to be in contact with the fluid (F), - at least one pressure determining element (20; 120) which is sensitive to the pressure (P) and which is integral with the membrane (2; 102), and - at least one temperature-determining element (40; 140) which is temperature-sensitive and which is integral the membrane (2; 102); The pressure and temperature determining device (1; 101) being characterized by: - said at least one pressure determining element (20; 120) comprising at least one piezoresistive track (22), and - in that said at least one temperature determining element (40; 140) comprises at least one thermistor track (42). [0002] 2. Device for determining pressure and temperature (1; 101) according to claim 1, wherein the membrane (2; 102) further has a securing face (2.2) opposite to the contact face (2.1), and Wherein said at least one pressure determining element (20; 120) and said at least one temperature determining element (40; 140) are secured directly to the securing face (2.2). [0003] 3. A pressure and temperature determining device (1; 101) according to any one of the preceding claims, wherein said at least one piezoresistive track (22) is printed on the membrane (2; 102), preferably by screen printing, and wherein said at least one thermistor track (42) is printed on the membrane (2; 102), preferably by screen printing. 35 [0004] A pressure and temperature determining device (1; 101) according to any one of the preceding claims, wherein said at least one piezoresistive track (22) forms a plurality of pressure gauges remote from each other, the determining device pressure and temperature sensor (1; 101) further comprising conductive tracks (24) connecting the pressure gauges to form an electrical pressure measuring circuit (25), for example a Wheatstone bridge. [0005] A pressure and temperature determining device (1; 101) according to any one of the preceding claims, wherein the membrane (2; 102) is composed of a ceramic, preferably comprising at least 95% alumina the membrane (2; 102) preferably having a thickness (E2) of between 0.2 mm and 2.0 mm. [0006] The pressure and temperature determining device (1; 101) according to any one of the preceding claims, wherein the membrane (2; 102) is generally flat. [0007] 7. A pressure and temperature determination device (1; 101) according to any one of the preceding claims, further comprising a base (4; 104), preferably comprising at least 95% alumina, said base (4; 104) being configured to define a chamber (6) around said at least one piezoresistive track (22) and said at least one thermistor track (42). [0008] 8. Device for determining pressure and temperature (1) according to any one of the preceding claims, wherein the base (4) has at least one vent hole (32) opening on the one hand on the membrane (2) and secondly on an outer face of the base (4). [0009] 9. A pressure and temperature sensor (51; 251; 351) for measuring pressures (P) and temperatures of a fluid (F) flowing for example in a motor vehicle, the pressure sensor 35 and temperature (51; 251; 351) comprising at least: - a pressure and temperature determining device (1; 101) according to any of the preceding claims - a connecting member (54; 254; 354) configured to fluidically connect the contact face (2.1) to a fluid channel (F), - an electronic signal conditioning unit (56; 256; 356) connected on the one hand to said at least one piezoresistive track (22) and on the other hand to said at least one thermistor track (42), and - a connector (58; 258; 358) connected to the electronic signal conditioning unit (56; 256; 356) and having output terminals (59). [0010] The pressure and temperature sensor (51; 251; 351) of claim 9, further comprising an O-ring (60; 260; 360) which is compressed between the contact face (2.1) and the periphery of the connecting member (54; 254; 354), the connecting member (54; 254; 354) having a passage (64; 264; 364) for the generally circular section fluid whose diameter (D64) is substantially equal to inner diameter of the O-ring (60; 260; 360) after compression of the O-ring (60; 260; 360). [0011] 11. Pressure and temperature sensor (51; 251; 351) according to any one of claims 9 to 10, further comprising at least two support pads arranged in plane support on the one hand against the base (4). ) and on the other hand against the connector (58; 258; 358). [0012] A pressure and temperature sensor (51; 151) according to any one of claims 9 to 11, further comprising resilient and conductive strips (375) respectively arranged between said output terminals (59) and the base (4) or said electronic signal conditioning unit (56; 256; 356). [0013] A pressure and temperature sensor (51; 151) according to any one of claims 9 to 12, wherein the connecting member (54; 254; 354) has a fixing portion (54,5; 254.5) in wherein the connector has a securing portion (58.5; 258.5), the securing portion (54.5; 254.5) being secured to the securing portion (58.5; 258.5) by welds. [0014] A pressure and temperature sensor (51; 151) according to claim 13, wherein all or some of the welds are located on at least one transverse, preferably perpendicular, weld surface (57; 257) to the contact (2.1; 202.1). [0015] 15. A manufacturing method (501) for manufacturing a pressure and temperature determining device (1; 101) according to any one of claims 1 to 8, the manufacturing method (501) comprising the steps of: - 502 ) depositing on the membrane (2; 102) conductive tracks, preferably through a first screen and thick film screen, - 504) depositing said at least one piezoresistive track (22), preferably through a second screen serigraphy, so as to secure said at least one piezoresistive track (22) to the membrane (2; 102), and 20 - 506) depositing said at least one thermistor track (42), preferably through a third screen screen , so as to secure said at least one thermistor track (42) to the membrane (2; 102). [0016] 16. The manufacturing method (501) according to claim 15, further comprising a step 508) of adjusting, by laser adjustment (known as "laser trimming"), said at least one piezoresistive track (22). ) and said at least one thermistor track (42).
类似技术:
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同族专利:
公开号 | 公开日 US9939340B2|2018-04-10| FR3017211B1|2016-01-22| CN104819799A|2015-08-05| US20150219514A1|2015-08-06|
引用文献:
公开号 | 申请日 | 公开日 | 申请人 | 专利标题 US20060000288A1|2004-07-02|2006-01-05|Honeywell International, Inc.|Differential pressure measurement using backside sensing and a single ASIC| EP2182340A1|2008-10-30|2010-05-05|Radi Medical Systems AB|Pressure Sensor and Guide Wire Assembly|FR3032272A1|2015-02-02|2016-08-05|Coutier Moulage Gen Ind|PRESSURE AND TEMPERATURE DETERMINATION DEVICE, PRESSURE AND TEMPERATURE SENSOR COMPRISING SUCH A DEVICE AND METHOD OF MANUFACTURING SUCH A DEVICE|US5088329A|1990-05-07|1992-02-18|Sahagen Armen N|Piezoresistive pressure transducer| DE59502169D1|1995-01-12|1998-06-18|Endress Hauser Gmbh Co|Ceramic pressure sensor with container connection element and double seal| US7152478B2|2000-07-20|2006-12-26|Entegris, Inc.|Sensor usable in ultra pure and highly corrosive environments| US20020134513A1|2001-03-22|2002-09-26|David Palagashvili|Novel thermal transfer apparatus| JP2006030159A|2004-06-15|2006-02-02|Canon Inc|Piezo resistance type semiconductor device and its manufacturing method| US7318351B2|2005-10-05|2008-01-15|Honeywell International Inc.|Pressure sensor| US7278319B2|2005-11-10|2007-10-09|Honeywell International Inc.|Pressure and temperature sensing element| ITTO20080485A1|2008-06-19|2009-12-20|Eltek Spa|PRESSURE SENSOR DEVICE| CN102175363A|2010-12-31|2011-09-07|东莞市百赛仪器有限公司|Pressure strain device manufactured by sputtering silicon film with ion beams and method thereof| CN103454032A|2013-08-16|2013-12-18|中国电子科技集团公司第四十八研究所|Pressure sensitive core with thermistor|DE102014114764A1|2014-10-13|2016-04-14|Endress + Hauser Gmbh + Co. Kg|Ceramic pressure sensor and method for its manufacture| JP6556522B2|2015-06-23|2019-08-07|サーパス工業株式会社|Pressure detection device| TWI577978B|2015-07-22|2017-04-11|旺玖科技股份有限公司|Impedance sensor and electronic apparatus using the same| DE102015222756A1|2015-11-18|2017-05-18|Robert Bosch Gmbh|Sensor element for a pressure sensor| IT201600081649A1|2016-08-03|2018-02-03|Kolektor Microtel S P A|PIEZORESISTIVE PRESSURE SENSOR EQUIPPED WITH OFFSET CALIBRATION RESISTOR| DE102016218211A1|2016-09-22|2018-03-22|Robert Bosch Gmbh|Pressure sensor for detecting a pressure of a fluid medium in a measuring space|
法律状态:
2015-12-30| PLFP| Fee payment|Year of fee payment: 3 | 2017-01-25| PLFP| Fee payment|Year of fee payment: 4 | 2018-01-25| PLFP| Fee payment|Year of fee payment: 5 | 2020-01-27| PLFP| Fee payment|Year of fee payment: 7 | 2020-05-01| CD| Change of name or company name|Owner name: AKWEL, FR Effective date: 20191127 | 2021-01-26| PLFP| Fee payment|Year of fee payment: 8 | 2022-01-25| PLFP| Fee payment|Year of fee payment: 9 |
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申请号 | 申请日 | 专利标题 FR1450877A|FR3017211B1|2014-02-05|2014-02-05|PRESSURE AND TEMPERATURE DETERMINATION DEVICE, PRESSURE AND TEMPERATURE SENSOR COMPRISING SUCH A DEVICE AND METHOD OF MANUFACTURING SUCH A DEVICE|FR1450877A| FR3017211B1|2014-02-05|2014-02-05|PRESSURE AND TEMPERATURE DETERMINATION DEVICE, PRESSURE AND TEMPERATURE SENSOR COMPRISING SUCH A DEVICE AND METHOD OF MANUFACTURING SUCH A DEVICE| US14/615,057| US9939340B2|2014-02-05|2015-02-05|Pressure and temperature determining device and pressure and temperature sensor comprising such a device| CN201510062149.7A| CN104819799A|2014-02-05|2015-02-05|Pressure and temperature determining device, pressure and temperature sensor comprising such a device and method for manufacturing such a device| 相关专利
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